MJB4 Manual Mask Aligner System

SUSS MJB4 MASK ALIGNER [BASE MACHINE] Machine base with mechanical, pneumatic, and electrical equipment 185V - 260V, 50/60Hz X, Y, Θ stage with high precision micrometer screws for sub-µm alignment of wafer to mask Accurate contact wedge and thickness compensation unit, alignment gap adjustable up to 50 µm Mask holder adaption with mechanical clamping, for masks 5“ x 5“ max. Manual adjustable top side alignment microscope stage for precise positioning of microscope to mask Travel range: X = ±40mm Y = +30mm, -50mm Θ = ± 4° (for split field microscopes only) Coarse/fine focus drive and integrated microscope lift Exposure unit with 350W lamp house Manual loading and unloading of wafers or substrates For pieces 5mm x 5mm up to wafer diameter 100mm or substrates 100mm x 100mm Additional Components Required for Functional System: High resolution top side microscope and objectives UV lamp and diffraction reduction exposure optics Lamp power supply and adapter Mask holders and chucks SUSS M604 SPLITFIELD MICROSCOPE STD/BRIGHTFIELD Microscope body with optics, trinocular tube for direct viewing and camera adaption Rotation and focus module Manual fine focus up to 2000µm 2 eyepieces 10X, turret 3X Objective separation in X = 32mm to 100mm Adjustable apertures for setting of brightness Microscope illumination 50W including fiber optics To be ordered separately: Bright field objectives VIDEO SYSTEM M500/M604STD For display of the microscope image on a screen B/W camera 1/2“, TFT monitor Camera adapter (magnification 1X) Camera power supply SINGLE OBJECTIVE UMPL FL 5X/0.15 Working distance: 20mm SINGLE OBJECTIVE UMPL FL 10X/0.30 Working distance: 10.1mm For masks up to 3.05mm thickness Not to be used in combination with LCMM mask holder SINGLE OBJECTIVE LMPL FL 20X/0.40 Working distance: 12mm LAMP ADAPTER LH350/HBO350W/S LAMP POWER SUPPLY UNIT CIC1200 FOR LH350 Constant light intensity mode Constant power mode For the DC lamps 200W, 350W/S, 500W, XE 500W Operation of additional lamp with a current of up to 35A possible (has to be specified and agreed upon) Easy operation due to microprocessor control Simultaneous digital display of light intensity and lamp power Integrated connector for UV-probe for easy calibration